Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7137874 | Semiconductor wafer, polishing apparatus and method | Ezio Bovio, Paride Corbellini, Marco Morganti, Peter Albrecht | 2006-11-21 |
| 6878302 | Method of polishing wafers | Paride Corbellini, Ezio Bovio, Luca Moiraghi | 2005-04-12 |
| 6479386 | Process for reducing surface variations for polished wafer | Kan-Yin Ng, Yun-Biao Xin, Henry F. Erk, Darrel Harris, James Jose +3 more | 2002-11-12 |