Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8436302 | Phase-shifting element and particle beam device having a phase-shifting element | Rasmus Schröder, Gerd Benner, Harald Rose | 2013-05-07 |
| 8173963 | Phase-shifting element and particle beam device having a phase-shifting element | Rasmus Schröder, Gerd Benner, Harald Rose | 2012-05-08 |
| 7902506 | Phase-shifting element and particle beam device having a phase-shifting element | Rasmus Schröder, Gerd Benner, Harald Rose | 2011-03-08 |