Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4957777 | Very low pressure chemical vapor deposition process for deposition of titanium silicide films | Vida Ilderem, Prabha K. Tedrow | 1990-09-18 |
| 4773355 | Growth of epitaxial films by chemical vapor deposition | Clifton G. Fonstad, Jr. | 1988-09-27 |
| 4668530 | Low pressure chemical vapor deposition of refractory metal silicides | Prabha K. Tedrow, Vida Ilderem | 1987-05-26 |
| 4659401 | Growth of epitaxial films by plasma enchanced chemical vapor deposition (PE-CVD) | Clifton G. Fonstad, Jr. | 1987-04-21 |
| 4579609 | Growth of epitaxial films by chemical vapor deposition utilizing a surface cleaning step immediately before deposition | Thomas J. Donahue, Wayne R. Burger | 1986-04-01 |