Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288663 | Charged particle source module | Eric Petrus Hogervorst, Jurgen VAN SOEST | 2025-04-29 |
| 11557455 | Charged particle source module | Eric Petrus Hogervorst, Jurgen VAN SOEST | 2023-01-17 |
| 10622188 | Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun | Eric Petrus Hogervorst | 2020-04-14 |
| 9466453 | Cathode arrangement, electron gun, and lithography system comprising such electron gun | Eric Petrus Hogervorst | 2016-10-11 |
| 9455112 | Cathode arrangement, electron gun, and lithography system comprising such electron gun | Eric Petrus Hogervorst | 2016-09-27 |
| 8916837 | Charged particle lithography system with intermediate chamber | Willem Henk Urbanus, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2014-12-23 |
| 8586949 | Charged particle lithography system with intermediate chamber | Willem Henk Urbanus, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2013-11-19 |