Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4995939 | Method and apparatus for determining the layer thickness of semiconductor layer structures | Gyorgy Ferenczi, Katalin Erdélyi, Maria Somogyi, Janos Boda, Gabor Aszodi | 1991-02-26 |