Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580680 | Metal silicide formation | Tuung Luoh, Ricky Huang, Chin-Ta Su, Tahone Yang, Kuang-Chao Chen | 2013-11-12 |
| 8520194 | Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) process | Tuung Luoh, Shing-Ann Luo, Chin-Ta Su, Ta-Hung Yang, Kuang-Chao Chen | 2013-08-27 |
| 8184288 | Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machine | Tuung Luoh, Shing-Ann Luo, Chin-Ta Su, Ta-Hung Yang, Kuang-Chao Chen | 2012-05-22 |
| 7553755 | Method for symmetric deposition of metal layer | Ling Yang, Chi-Tung Huang, Kuang-Chao Chen | 2009-06-30 |