Issued Patents All Time
Showing 126–132 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8382900 | Localized linear microwave source array pumping to control localized partial pressure in flat and 3 dimensional PECVD coatings | — | 2013-02-26 |
| 8349156 | Microwave-assisted rotatable PVD | Richard Newcomb | 2013-01-08 |
| 8057649 | Microwave rotatable sputtering deposition | Nety M. Krishna | 2011-11-15 |
| 7993733 | Index modified coating on polymer substrate | Manuel Campo | 2011-08-09 |
| 7842355 | System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties | — | 2010-11-30 |
| 7550927 | System and method for generating ions and radicals | Guenter Klemm, Hans-Georg Lotz, Volker Hacker | 2009-06-23 |
| 7247221 | System and apparatus for control of sputter deposition process | — | 2007-07-24 |