Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6259209 | Plasma processing apparatus with coils in dielectric windows | Leslie Michael Lea | 2001-07-10 |
| 6187685 | Method and apparatus for etching a substrate | Janet Hopkins, Ian R. Johnston, Huma Ashraf, Alan Michael Hynes, Leslie Michael Lea | 2001-02-13 |
| 6051503 | Method of surface treatment of semiconductor substrates | Huma Ashraf, Babak Khamsehpour, Janet Hopkins, Alan Michael Hynes, Martin Edward Ryan +1 more | 2000-04-18 |