Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6054062 | Method and apparatus for agitating an etchant | Jeffrey C. Calio, Timothy Hendrix | 2000-04-25 |
| 5933757 | Etch process selective to cobalt silicide for formation of integrated circuit structures | Wilbur G. Catabay | 1999-08-03 |
| 5902129 | Process for forming improved cobalt silicide layer on integrated circuit structure using two capping layers | Zhihai Wang, Wilbur G. Catabay | 1999-05-11 |