Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972840 | Method of reducing process plasma damage using optical spectroscopy | Shiqun Gu, Peter McGrath | 2005-12-06 |
| 6806038 | Plasma passivation | Shiqun Gu, Hong Lin | 2004-10-19 |
| 6673200 | Method of reducing process plasma damage using optical spectroscopy | Shiqun Gu, Peter McGrath | 2004-01-06 |