Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8758513 | Processing apparatus | Jin Seok Lee, Hyuk Sang Yoon, Byeong Eok Hwang | 2014-06-24 |
| 8741116 | Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same | Tae Hyun Lim, Byung Han Yun | 2014-06-03 |
| 8470142 | Sputtering apparatus and driving method thereof | Sung Eun Kim, Tae Hyun Lim, Kwang Jong Yoo, Yang Sik Moon, Byeong Cheol An | 2013-06-25 |
| 8142111 | Support platform of non-contact transfer apparatus | Sung Eun Kim, Hyun Joo Jeon, Ji-Young OH, Tae Kyun Kwon | 2012-03-27 |
| 8113761 | Support platform of non-contact transfer apparatus | Sang Eon Ahn, Hyun Joo Jeon, Ji-Young OH, Cheon Soo Lee | 2012-02-14 |
| 8052850 | Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same | Tae Hyun Lim, Byung Han Yun | 2011-11-08 |
| 7981263 | Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same | Hyuk Sang Yoon, Byung Han Yun | 2011-07-19 |
| 7927045 | Support platform of non-contact transfer apparatus | Sung Eun Kim, Hyun Joo Jeon, Ji-Young OH, Tae Kyun Kwon | 2011-04-19 |
| 7708866 | Sputtering apparatus | Sung Eun Kim, Cheon Soo Lee, Byung Han Yun | 2010-05-04 |