Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8741116 | Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same | Tae Hyun Lim, Hwan Kyu Yoo | 2014-06-03 |
| 8052850 | Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same | Tae Hyun Lim, Hwan Kyu Yoo | 2011-11-08 |
| 8007644 | Inclined carrier transferring apparatus | Sung Eun Kim, Tae Hyun Lim, Kwang Jong Yoo, Yang Sik Moon | 2011-08-30 |
| 7981263 | Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same | Hyuk Sang Yoon, Hwan Kyu Yoo | 2011-07-19 |
| 7708866 | Sputtering apparatus | Sung Eun Kim, Cheon Soo Lee, Hwan Kyu Yoo | 2010-05-04 |