ML

Michael Lubbehusen

LG Leybold Gmbh: 2 patents #119 of 430Top 30%
UG Unaxis Deutschland Gmbh: 1 patents #6 of 26Top 25%
Overall (All Time): #1,617,894 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6440281 Device for the prevention of arcing in vacuum sputtering installations Johann Sturmer, Gernot Thorn 2002-08-27
5182001 Process for coating substrates by means of a magnetron cathode Wolf-Eckhart Fritsche, Reiner Kukla, Siegfried BeiBwenger 1993-01-26
5069772 Apparatus for coating substrates by means of a magnetron cathode Wolf-Eckhart Fritsche, Reiner Kukla, Siegfried BeiBwenger 1991-12-03