Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5069930 | Method for the evaporation of monomers that are liquid at room temperature | Jochen Ritter | 1991-12-03 |
| 4947789 | Apparatus for vaporizing monomers that flow at room temperature | Jochen Ritter | 1990-08-14 |
| 4948259 | Method and apparatus for monitoring layer erosion in a dry-etching process | Knut Enke, Gerhard Lorenz | 1990-08-14 |