Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547559 | Clamping of a semiconductor substrate for gas-assisted heat transfer in a vacuum chamber | — | 2003-04-15 |
| 5295777 | Wafer transport module with rotatable and horizontally extendable wafer holder | — | 1994-03-22 |
| 5154730 | Semiconductor wafer processing module having an inclined rotating wafer handling turret and a method of using the module | Steven Hurwitt | 1992-10-13 |