Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5575856 | Thermal cycle resistant seal and method of sealing for use with semiconductor wafer processing apparatus | Robert F. Foster, Joseph T. Hillman | 1996-11-19 |
| 4861563 | Vacuum load lock | J. B. Price | 1989-08-29 |