Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7682985 | Dual doped polysilicon and silicon germanium etch | C. Robert Koemtzopoulos, Yoko Y. Adams, Yoshinori Miyamoto | 2010-03-23 |
| 6923920 | Method and compositions for hardening photoresist in etching processes | Wendy Nguyen, Chris Lee | 2005-08-02 |