Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6221792 | Metal and metal silicide nitridization in a high density, low pressure plasma reactor | Yun-Yen Jack Yang, Ching-Hwa Chen | 2001-04-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6221792 | Metal and metal silicide nitridization in a high density, low pressure plasma reactor | Yun-Yen Jack Yang, Ching-Hwa Chen | 2001-04-24 |