PT

Philip Tuley

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,652,450 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5916454 Methods and apparatus for reducing byproduct particle generation in a plasma processing chamber Brett C. Richardson, Merrill D. Crapse 1999-06-29