Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916454 | Methods and apparatus for reducing byproduct particle generation in a plasma processing chamber | Brett C. Richardson, Philip Tuley | 1999-06-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916454 | Methods and apparatus for reducing byproduct particle generation in a plasma processing chamber | Brett C. Richardson, Philip Tuley | 1999-06-29 |