Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163602 | Apparatus for generating planar plasma using concentric coils and ferromagnetic cores | — | 2007-01-16 |
| 5994236 | Plasma source with process nonuniformity improved using ferromagnetic cores | — | 1999-11-30 |
| 5944942 | Varying multipole plasma source | — | 1999-08-31 |
| 5935077 | Noninvasive blood flow sensor using magnetic field parallel to skin | — | 1999-08-10 |
| 5435881 | Apparatus for producing planar plasma using varying magnetic poles | — | 1995-07-25 |
| 5277751 | Method and apparatus for producing low pressure planar plasma using a coil with its axis parallel to the surface of a coupling window | — | 1994-01-11 |
| 5107201 | High voltage oscilloscope probe with wide frequency response | — | 1992-04-21 |
| 4948458 | Method and apparatus for producing magnetically-coupled planar plasma | — | 1990-08-14 |
| 4871421 | Split-phase driver for plasma etch system | Gerald Yin | 1989-10-03 |