Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354888 | Method and apparatus for anisotropic tungsten etching | Zhongkui Tan, Qian Fu | 2019-07-16 |
| 9633867 | Method and apparatus for anisotropic tungsten etching | Zhongkui Tan, Qian Fu | 2017-04-25 |