Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649996 | In situ and ex situ hardmask process for STI with oxide collar application | Alan J. Miller | 2003-11-18 |
| 6225234 | In situ and ex situ hardmask process for STI with oxide collar application | Alan J. Miller | 2001-05-01 |