Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147587 | Waferless clean in dielectric etch process | Shijian Li, David Carman | 2018-12-04 |
| 9824865 | Waferless clean in dielectric etch process | Shijian Li, David Carman | 2017-11-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147587 | Waferless clean in dielectric etch process | Shijian Li, David Carman | 2018-12-04 |
| 9824865 | Waferless clean in dielectric etch process | Shijian Li, David Carman | 2017-11-21 |