AB

Arunima Deya BALAN

Lam Research: 1 patents #1,364 of 2,128Top 65%
📍 Mountain View, CA: #7,876 of 11,022 inventorsTop 75%
🗺 California: #247,236 of 386,348 inventorsTop 65%
Overall (All Time): #2,428,792 of 4,157,543Top 60%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12341021 Selective etch using deposition of a metalloid or metal containing hardmask Samantha Tan, Daniel Peter, Younghee Lee, Yang Pan 2025-06-24