Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913521 | Methods using active retainer rings for improving edge performance in CMP applications | John M. Boyd, Rod Kistler | 2005-07-05 |
| 6776695 | Platen design for improving edge performance in CMP applications | John M. Boyd, Rod Kistler | 2004-08-17 |
| 6607425 | Pressurized membrane platen design for improving performance in CMP applications | Rod Kistler, John M. Boyd | 2003-08-19 |