Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4981723 | Chemical vapor deposition of tungsten silicide using silicon sub-fluorides | Ikuo Hirase, Denis Rufin, Michael Schack, Tooru Sumiya, Masamichi Matsuura | 1991-01-01 |