Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5114683 | Thermal decomposition trap | — | 1992-05-19 |
| 5084080 | Device for trapping gaseous compounds of refractory metals and pumping plant including same | Denis Rufin, Tooru Sumiya, Masamichi Matsuura | 1992-01-28 |
| 4981723 | Chemical vapor deposition of tungsten silicide using silicon sub-fluorides | Denis Rufin, Michael Schack, Tooru Sumiya, Masamichi Matsuura, Sadayuki Urishima | 1991-01-01 |
| 4886444 | Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process | Denis Rufin | 1989-12-12 |
| 4872944 | Process for the control in real time of the selectivity of the etching by analysis of the plasma gases in a process of reactive ionic etching and a reactor therefore | Denis Rufin | 1989-10-10 |