Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6261938 | Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography | Jacques Beauvais, Eric Lavallee | 2001-07-17 |
| 5918143 | Fabrication of sub-micron silicide structures on silicon using resistless electron beam lithography | Jacques Beauvais, Eric Lavallee | 1999-06-29 |