Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897140 | Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography | Dominique Drouin, Jacques Beauvais | 2005-05-24 |
| 6855646 | Plasma polymerized electron beam resist | Yousef Awad, Jacques Beauvais, Dominique Drouin | 2005-02-15 |
| 6777167 | Method of producing an etch-resistant polymer structure using electron beam lithography | Jacques Beauvais, Dominique Drouin, Mëlanie Cloutier | 2004-08-17 |
| 6514877 | Method using sub-micron silicide structures formed by direct-write electron beam lithography for fabricating masks for extreme ultra-violet and deep ultra-violet lithography | Jacques Beauvais, Dominique Drouin | 2003-02-04 |
| 6261938 | Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography | Jacques Beauvais, Dominique Drouin | 2001-07-17 |
| 5918143 | Fabrication of sub-micron silicide structures on silicon using resistless electron beam lithography | Jacques Beauvais, Dominique Drouin | 1999-06-29 |