Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524896 | Aqueous hydrogen peroxide purification method and purification system | Yoshiaki Ide, Takaaki Chuuman | 2022-12-13 |
| 10138149 | Ultrapure water production system, ultrapure water production feed system, and method for cleaning thereof | Takeo Fukui, Yoichi Tanaka | 2018-11-27 |
| 9370802 | Cleaning and sterilizing method for ultrapure water manufacturing system | — | 2016-06-21 |
| 8012755 | Water quality evaluation method and substrate contacting apparatus used | Takeo Fukui, Tetsuo Mizuniwa | 2011-09-06 |