Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326402 | Vibration insensitive interferometry for measuring thickness and profile of multilayer thin-film | Yong-sik Ghim, Yong Bum Seo | 2025-06-10 |
| 11906281 | Device and method for measuring thickness and refractive index of multilayer thin film by using angle-resolved spectral reflectometry | Young-sik Ghim | 2024-02-20 |
| 11486700 | System and method for 3D shape measurement of freeform surface based on high-speed deflectometry using composite patterns | Young-sik Ghim, The Manh NGUYEN | 2022-11-01 |
| 11466978 | Apparatus and method for measuring the thickness and refractive index of multilayer thin films using angle-resolved spectral interference image according to polarization | Young-sik Ghim | 2022-10-11 |
| 11255662 | System and method for compensating for non-linear response characteristic in phase-shifting deflectometry | Young-sik Ghim, The-mahn Nguyen | 2022-02-22 |
| 11243070 | Apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry | Young-sik Ghim | 2022-02-08 |
| 10466031 | Apparatus for measuring thickness and surface profile of multilayered film structure using imaging spectral optical system and measuring method | Young-sik Ghim, Yun-Woo Lee | 2019-11-05 |
| 9863814 | Correction of rotational inaccuracy in lateral shearing interferometry | Young-sik Ghim, Ho Soon Yang, Yun-Woo Lee | 2018-01-09 |
| 9707714 | Apparatus and method for manufacturing fine pattern using interferogram of optical axis direction | Yun-Woo Lee | 2017-07-18 |
| 9223223 | Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the same | Yun-Woo Lee | 2015-12-29 |