Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867643 | Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried | Hyo Chang Lee, Jung Hyung Kim, Dae Jin Seong | 2024-01-09 |
| 11735397 | Device for measuring plasma ion density and apparatus for diagnosing plasma using the same | Hyo Chang Lee, Jung Hyung Kim | 2023-08-22 |