Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867643 | Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried | Hyo Chang Lee, Jung Hyung Kim, Hee Jung Yeom | 2024-01-09 |
| 11211231 | Plasma generation apparatus | Hyo Chang Lee, Jung Hyung Kim | 2021-12-28 |
| 7830505 | Structure for diagnosis system of reaction process | Sang-Woo Kang, Ju-Young Yun, Yong Hyeon Shin | 2010-11-09 |
| 6687626 | Apparatus for measuring distribution of flow rates of flowable medium | Yong Hyeon Shin, Jung Hyung Kim, Jong Yeon Lim, Kwang Hwa Jung | 2004-02-03 |