Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704145 | Reaction chamber for chemical vapor apparatus | Chul Soo Byun | 2020-07-07 |
| 9476121 | Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof | Chul Soo Byun | 2016-10-25 |
| 9469900 | Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof | Chul Soo Byun | 2016-10-18 |
| 9315897 | Showerhead for film depositing vacuum equipment | Chulsoo Byun, Il Yong Chung, Seok Woo Lee | 2016-04-19 |
| 8882913 | Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof | Chul Soo Byun | 2014-11-11 |