Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9315897 | Showerhead for film depositing vacuum equipment | Man Cheol Han, Il Yong Chung, Seok Woo Lee | 2016-04-19 |
| 7485339 | Method for chemical vapor deposition capable of preventing contamination and enhancing film growth rate | — | 2009-02-03 |
| 7156921 | Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rate | — | 2007-01-02 |