Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350650 | Method for fabricating a semiconductor memory device | — | 2002-02-26 |
| 6288493 | Antenna device for generating inductively coupled plasma | Yong Kwan Lee, Nam-Sik Yoon, Sung-Sik Kim, Hong-Young Chang | 2001-09-11 |
| 5627640 | Method for measuring radical species distribution in plasma and an apparatus therefor | Hong-Young Chang, Yong Jin Kim | 1997-05-06 |