Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733075 | System and method for assessing inhomogeneous deformations in multilayer plates | Marcel Broekaart, Arnaud Castex | 2017-08-15 |
| 9583531 | Process for transferring circuit layer | Marcel Broekaart | 2017-02-28 |
| 8067147 | Removable pellicle for immersion lithography | Peter Dirksen, Robert Duncan Morton, Peter Zandbergen, David Van Steenwinckel, Yuri Aksenov +2 more | 2011-11-29 |