Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7579307 | Cleaner for semiconductor devices | Shigemasa Suga, Shigeru Kamon, Akihiro Terai | 2009-08-25 |
| 6534459 | Resist residue remover | Shigeki Terayama, Yutaka Koinuma, Takeru Ohgushi | 2003-03-18 |
| 6147042 | Detergent for processes for producing semiconductor devices or producing liquid crystal devices | Yutaka Koinuma, Kazunori Fukumura, Yoshihito Fukumura | 2000-11-14 |