Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7579307 | Cleaner for semiconductor devices | Shigeru Kamon, Takashi Yata, Akihiro Terai | 2009-08-25 |
| 5120965 | Apparatus and method for inverse photoemission | Hirohumi Namatame | 1992-06-09 |