Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626039 | Electrically decoupled silicon gyroscope | James L. Groves, Donato Cardarelli, Raymond Carroll, Charles R. Dauwalter | 2003-09-30 |
| 6544863 | Method of fabricating semiconductor wafers having multiple height subsurface layers | John Chong, Paul C. Waldrop, Tim Davis | 2003-04-08 |
| 6342430 | Trench isolation for micromechanical devices | Kevin A. Shaw, Russell Y. Webb, Bryan W. Reed, Noel C. MacDonald, Timothy Joel Davis | 2002-01-29 |
| 6239473 | Trench isolation for micromechanical devices | Kevin A. Shaw, Russell Y. Webb, Bryan W. Reed, Noel C. MacDonald, Timothy Joel Davis | 2001-05-29 |
| 6170332 | Micromechanical accelerometer for automotive applications | Noel C. MacDonald, Kevin A. Shaw | 2001-01-09 |
| 6093330 | Microfabrication process for enclosed microstructures | John Chong, Noel C. MacDonald, Kevin A. Shaw | 2000-07-25 |
| 5914553 | Multistable tunable micromechanical resonators | Yongmei Wang, Noel C. MacDonald, James S. Thorp | 1999-06-22 |
| 5640133 | Capacitance based tunable micromechanical resonators | Noel C. MacDonald, Fred M. Bertsch, Kevin A. Shaw | 1997-06-17 |
| 5610335 | Microelectromechanical lateral accelerometer | Kevin A. Shaw, Noel C. MacDonald | 1997-03-11 |
| 5563343 | Microelectromechanical lateral accelerometer | Kevin A. Shaw, Noel C. MacDonald | 1996-10-08 |