Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10786815 | Rotor for a disintegration device | Dieter Lompa | 2020-09-29 |
| 6569773 | Method for anisotropic plasma-chemical dry etching of silicon nitride layers using a gas mixture containing fluorine | Norbert Gellrich | 2003-05-27 |