Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10518382 | Substrate processing system | Byoung Chaul Son, Moon Gi Cho, Joon Ho An | 2019-12-31 |
| 10002777 | Substrate processing system and substrate processing method | Joon Ho An, Byoung Chaul Son, Jin Sung Rho | 2018-06-19 |