Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5563093 | Method of manufacturing fet semiconductor devices with polysilicon gate having large grain sizes | Munetaka Koda, Yoshikatsu Shida, Junichi Kawaguchi, Yoshio Kaneko | 1996-10-08 |
| 5326406 | Method of cleaning semiconductor substrate and apparatus for carrying out the same | Yoshio Kaneko, Munetaka Koda, Tadayoshi Shiraishi | 1994-07-05 |