Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5563093 | Method of manufacturing fet semiconductor devices with polysilicon gate having large grain sizes | Yoshikatsu Shida, Junichi Kawaguchi, Takehiro Murakami, Yoshio Kaneko | 1996-10-08 |
| 5466641 | Process for forming polycrystalline silicon film | Tetushi Shimizu, Yoshikatsu Shida, Jun Kawaguchi, Yoshio Kaneko | 1995-11-14 |
| 5326406 | Method of cleaning semiconductor substrate and apparatus for carrying out the same | Yoshio Kaneko, Tadayoshi Shiraishi, Takehiro Murakami | 1994-07-05 |