Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8735181 | Manufacturing system for semiconductor device capable of controlling variation in electrical property of element in wafer surface and method for manufacturing the semiconductor device | Osamu Fujii, Hisato Oyamatsu, Takeshi Shibata | 2014-05-27 |
| 7557040 | Method of manufacture of semiconductor device | Hiroshi Itokawa, Toshihiko Iinuma, Haruko Akutsu, Kyoichi Suguro | 2009-07-07 |
| 7402444 | Method and apparatus for manufacturing a semiconductor device | Hiroshi Itokawa | 2008-07-22 |
| 7247867 | Ion implanter and method of manufacturing semiconductor device | Hiroshi Itokawa, Kyoichi Suguro | 2007-07-24 |
| 7145658 | Apparatus and method for evaluating semiconductor material | Haruko Akutsu, Katsumi Rikimaru, Kyoichi Suguro, Tatsuya Shima, Atsushi Murakoshi | 2006-12-05 |
| 6769908 | Wafer heat-treatment system and wafer heat-treatment method | — | 2004-08-03 |