Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5756402 | Method of etching silicon nitride film | Sadayuki Jimbo, Tokuhisa Ohiwa, Haruki Mori, Akira Kobayashi, Yasuyuki Taniguchi | 1998-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5756402 | Method of etching silicon nitride film | Sadayuki Jimbo, Tokuhisa Ohiwa, Haruki Mori, Akira Kobayashi, Yasuyuki Taniguchi | 1998-05-26 |