Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7595885 | Process monitoring system, process monitoring method, and method for manufacturing semiconductor device | Takayuki Sakai, Tokuhisa Ohiwa | 2009-09-29 |
| 7349088 | Process monitoring system, process monitoring method, and method for manufacturing semiconductor device | Takayuki Sakai, Tokuhisa Ohiwa | 2008-03-25 |
| 7327455 | Process monitoring system, process monitoring method, and method for manufacturing semiconductor device | Takayuki Sakai, Tokuhisa Ohiwa | 2008-02-05 |
| 7045462 | Method for fabricating a pattern and method for manufacturing a semiconductor device | Takayuki Sakai, Tokuhisa Ohiwa | 2006-05-16 |