Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7821628 | Mask defect inspection computer program product | Shinji Yamaguchi, Soichi Inoue, Satoshi Tanaka | 2010-10-26 |
| 7295304 | Mask defect inspecting method, semiconductor device manufacturing method, mask defect inspecting apparatus, defect influence map generating method, and computer program product | Shinji Yamaguchi, Soichi Inoue, Satoshi Tanaka | 2007-11-13 |
| 7185311 | Mask evaluating method, mask evaluating system, method of manufacturing mask and computer program product | — | 2007-02-27 |
| 6689625 | Method for correcting a design data of a layout pattern of a photomask, photomask manufactured by said method, and semiconductor device method using said photomask | — | 2004-02-10 |