Issued Patents All Time
Showing 1–25 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362098 | Capacitor and etching method | Kazuo Shimokawa, Susumu Obata, Mitsuo Sano | 2025-07-15 |
| 12278109 | Etching apparatus and etching method | Takayuki TAJIMA, Susumu Obata, Mitsuo Sano | 2025-04-15 |
| 11901185 | Etching method | Mitsuo Sano, Susumu Obata, Takayuki TAJIMA | 2024-02-13 |
| 11862667 | Capacitor | Susumu Obata, Keiichiro Matsuo, Mitsuo Sano, Kazuo Shimokawa | 2024-01-02 |
| 11688557 | Capacitor and etching method | Kazuo Shimokawa, Susumu Obata, Mitsuo Sano | 2023-06-27 |
| 11664231 | Method for manufacturing semiconductor device | — | 2023-05-30 |
| 11588059 | Structural body and method of manufacturing the same | Mitsuo Sano, Susumu Obata, Kazuo Shimokawa | 2023-02-21 |
| 11551864 | Capacitor and capacitor module | Keiichiro Matsuo, Susumu Obata, Mitsuo Sano, Kazuo Shimokawa | 2023-01-10 |
| 11508525 | Capacitor having trenches on both surfaces | Susumu Obata, Keiichiro Matsuo, Mitsuo Sano | 2022-11-22 |
| 11411074 | Structure and method of producing the same | Mitsuo Sano, Susumu Obata | 2022-08-09 |
| 11322308 | Capacitor | Mitsuo Sano, Susumu Obata, Kazuo Shimokawa | 2022-05-03 |
| 10991590 | Etching method and plating solution | Mitsuo Sano, Keiichiro Matsuo, Susumu Obata, Kazuo Shimokawa | 2021-04-27 |
| 10978358 | Processing system for a catalytic layer of a noble metal formed on a surface of a substrate | Mitsuo Sano, Keiichiro Matsuo, Susumu Obata, Kazuo Shimokawa | 2021-04-13 |
| 10964474 | Capacitor and capacitor module | Keiichiro Matsuo, Susumu Obata, Mitsuo Sano, Kazuo Shimokawa | 2021-03-30 |
| 10867801 | Etching apparatus and etching method | — | 2020-12-15 |
| 10854466 | Etching method, method of manufacturing semiconductor chip, and method of manufacturing article | Keiichiro Matsuo, Susumu Obata, Mitsuo Sano, Kazuo Shimokawa | 2020-12-01 |
| 10410976 | Method of manufacturing semiconductor chip, semiconductor chip, and semiconductor device | Yusaku Asano, Taizo Tomioka, Tomohiro Iguchi | 2019-09-10 |
| 10233557 | Electroplating method and electroplating device | Yusaku Asano, Kyoko Honma, Kazuma Hiraguri, Yasunari Ukita, Masayuki Uchida +4 more | 2019-03-19 |
| 10090158 | Etching method, method of manufacturing semiconductor chip, and method of manufacturing article | Keiichiro Matsuo, Yusaku Asano, Kazuo Shimokawa | 2018-10-02 |
| 9460967 | Method of manufacturing semiconductor chip, semiconductor chip, and semiconductor device | Yusaku Asano, Taizo Tomioka, Tomohiro Iguchi | 2016-10-04 |
| 9431588 | Semiconductor device and method for manufacturing the same | Kazuo Shimokawa, Takashi Koyanagawa, Takeshi Miyagi, Akihiko Happoya, Tomoyuki Kitani | 2016-08-30 |
| 9202982 | Semiconductor light emitting device and method for manufacturing the same | Susumu Obata, Toshiya Nakayama, Hisashi Ito, Akiya Kimura, Kazuo Shimokawa +4 more | 2015-12-01 |
| 9171882 | Semiconductor light emitting device and light emitting module | Yosuke Akimoto, Yoshiaki Sugizaki, Akihiro Kojima, Hideo Nishiuchi, Susumu Obata | 2015-10-27 |
| 9153510 | Semiconductor device and method of manufacturing the same | Masafumi Sugimoto, Eiichi Hosomi, Atsushi Murakawa, Kazumi Takahashi, Susumu Obata | 2015-10-06 |
| 9142727 | Semiconductor light emitting device | Susumu Obata, Takayoshi Fujii, Akihiro Kojima | 2015-09-22 |